Simultaneous Voltage and Laser Pulsing in Atom Probe Tomography

Ultrafast Laser Assisted Field Evaporation and Atom Probe Tomography Applications

Considering the recent developments of the pulsed laser in the femtosecond domain, the possibility of conceiving a new laser assisted Tomographic Atom Probe has been nvisaged. The instrument is able to map out the 3D distributions of the atomic positions in a The interest of the terial sciences has already been demonstrated many times [3,4]. However, since HV mples have to be electrically good ...

Preparation of nanowire specimens for laser-assisted atom probe tomography.

The availability of reliable and well-engineered commercial instruments and data analysis software has led to development in recent years of robust and ergonomic atom-probe tomographs. Indeed, atom-probe tomography (APT) is now being applied to a broader range of materials classes that involve highly important scientific and technological problems in materials science and engineering. Dual-beam...

Atom probe tomography in nanoelectronics

The role of laser assisted atom probe tomography (APT) in microelectronics is discussed on the basis of various illustrations related to SiGe epitaxial layers, bipolar transistors or MOS nano-devices including gate all around (GAA) devices that were carried out at the Groupe de Physique des Matériaux of Rouen (France). 3D maps as provided by APT reveal the atomic-scale distribution of dopants a...

Toward atom probe tomography of microelectronic devices

Atom Probe Tomography of Oxide Scales

Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1-0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented. It is followed by e...